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| Throughout the semiconductor fabrication process, it is necessary to minimize the amount of contamination that comes into contact with the wafer and the wafer processing equipment. Contamination control has become a major factor in manufacturing yield and profitability in semiconductor processing. Contamination from the environment, factory personnel, processing equipment, and all materials used to fabricate the devices are major concern in the manufacturing environment. Water is used in the rinsing step at the end of almost every cleaning operation. The frequent use of water makes it imperative that contain minimum amounts of potentially harmful contaminants. |
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